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List of MIMOSA chips

Dernière mise à jour : mercredi 10 avril 2013, par Auguste BESSON

This table summarises the main characteristics of Mimosa prototypes (and also Successors from the SUCIMA project). It includes year fabrication, process, epitaxial layer thickness, pitch, number of metal layers, number of pixels, and particularities attached to each chips.

List of all chips (Excel file)

Chip (images) Year Process (µm) Epi.(µm) Pitch (µm) Metal Pixels Peculiar Doc.
M1 (1) 1999 AMS 0.6 14 20 3M 16k thick epitaxy
M2 (1) 2000 MIETEC 0.35 4.2 20 5M 16k thin epitaxy
M3 (1) 2001 IBM 0.25 2 8 3M 32k deep sub-µm (1)
M4 (1) 2001 AMS 0.35 no 20 3M 16k low dop. Substrate
M5 (1) (2) (3) (4) (5) 2001 AMS 0.6 14 17 3M 1M real scale 1M pixels (1)(2)
M6 (1) 2002 AMIS 0.35 4.2 28 5M 4k fast col. // r.o. and integrated spars. (1) (2)
M7 (1) 2003 AMS 0.35 no 25 4M 1k fast col. // r.o. + integ. spars. (photoFET) (1)
M8 (1) (2) 2003 TSMC 0.25 ~8 25 5M 4k fast col. // r.o. and integrated spars. (1) (2) (pos)
M9 (1) (2) (3) 2004 AMS 0.35 opto ~14 20/30/40 4M 7k tests diodes/pitch/leakage current (1) (2)
M9 no epi 2004 AMS 0.35 opto no 20/30/40 4M 7k tests diodes/pitch/leakage current
M10 Star 1 (1) (2) 2004 TSMC 0.25 ~8 30 3M 16k 1st proto. for STAR vtx det. upgrade manual
M11 (1) (2) 2005 AMS 0.35 opto ~14 30 3M 7k rad.tol. struct. (1)
M12 Mosaic 1 (1) 2005 AMS 0.35 hires no 35 4M 0.6k multi-memory pixels (FAPS) (1)
M13 Mosaic 2 (1) 2005 AMS 0.35 hires no 20 4M 1.4k fast col. // r.o.
M14 Star 2 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) 2005 AMS 0.35 opto ~14 30 4M 16k final proto. STAR vtx det. upgrade manual
M15 (1) (2) (3) 2005 AMS 0.35 opto ~14 20/30 4M 7k multi-purpose tracker-imager (1)
M16 (1) (2) 2006 AMS 0.35 opto ~14&20 25 4M 4k M8 translation in AMS opto (1) (2)
M17 Mtel (1) (2) (3) 2006 AMS 0.35 opto ~14&20 30 4M 65k Eudet telescope demonstrator manual
M18 Mimager.1 (1) 2006 AMS 0.35 opto ~14&20 ~10 4M 262k imager, high resolution (1)
M18 AHR (1) 2010 AMS HiRes 0.35 opto ~10/15/20 ~10 4M 262k imager, high resolution (1)
M19 Mimager.2 (1) 2006 AMS 0.35 opto ~14&20 ~12 4M 80k imager, charge spreading suppression
M20 Star 3 (1) 2006-08 AMS 0.35 opto ~14&20 30 4M 204k STAR vtx det. upgrade manual
M21 (1) (1) 2006 STM 0.25 biCMOS no 20/10 4M 24.5k + 6k process exploration
M22 (1) (2) (3 mi22ter) 2007 AMS 0.35 opto 14 18.4 4M 73k digital + 4,6k analog proto numerique EUDET (mi22)(mi22bis)(mi22ter)
M22AHR 2010 AMS HiRes 0.35 opto 10-15-20 18.4/20.7 4M 73k digital + 4,6k analog proto numerique EUDET (mi22AHR)
M23 Phase1&2 (1)(2) 2008 AMS 0.35 opto 14 30 4M 410k digital real scale Digital chip manual
M24 (1)(2) 2008 XFAB 0.35 ~14 20-30 4M 13k exploration techno (1)
M25 (1) 2008 XFAB 0.6 PIN ~no high res. 20/30/40 3M 4.8k exploration techno (1)
M26 (1) mi26AHR 2008 2009 AMS0.35opto AMS0.35 opto HiRes std14 HR10/15/20 18.4 4M 660k Digital chip final EUDET with suze manual
M27 (1) 2010 XFAB 0.18 20 5M 16k exploration techno (1)
M28 Ultimate (1)(2) 2011 AMS 0.35 opto HiRes 15 &20 20.7 4M 890k Digital STAR chip final manual
M29 (1)(2) 2011 AMS 0.35 opto HiRes 15 &20 16*64 & 16*80 4M 26k Elongated pixel (1)
M30 (1) (2) 2011 AMS 0.35 opto HiRes 15 &20 16² & 16*64 4M 40k digital Square & Elongated pixel (1)
M31 (1) (2) 2011 AMS 0.35 opto HiRes 15 &20 35 4M 3k digital ADC 4 bit (1)
M32 (1)(2) M32bis 2011 2012 Tower 0.18 HiRes HiRes18 / std 20 4M 40k exploration techno (Mi32)(Mi32bis)
M32Ter 2012 Tower 0.18 HiRes HiRes18 /std 20 6M 40k exploration techno (Mi32ter)
M32FEE(1) M32N1/N2 2013 Tower 0.18 HiRes HiRes18 20 6M 40k exploration techno (Mi32FEE)(Mi32N1/2)
M34(1) 2013 Tower 0.18 HiRes HiRes18 22µm variation 33µm variation 6M 40k exploration techno (Mi34)
Chip Year Process (µm) Epi.(µm) Pitch (µm) Metal Pixels Peculiar Documents
SUC 1 2003 AMIS 0.35 4.2 25-35 5M 4k rad.tol. struct. (SUCIMA project)
SUC 2 2003 AMS 0.35 no 40 3M 4k low dop. Substrate (SUCIMA project)
SUC 3 2003 AMIS 0.35 4.2 20 5M 8k rad.tol. struct. (SUCIMA project)
SUC 4 Mtera 2004 AMS 0.35 14 150 3M 12.5k hadrontherapy/beam monitor. (SUCIMA) (1)
SUC 5 2004 AMIS 0.35 4.2 30 5M 65k proto. Dosimetry (SUCIMA project)